Self-buckling of micromachined beams under resistive heating

Article Properties
Journal Categories
Science
Mathematics
Instruments and machines
Science
Physics
Technology
Chemical technology
Technology
Electrical engineering
Electronics
Nuclear engineering
Electric apparatus and materials
Electric circuits
Electric networks
Technology
Engineering (General)
Civil engineering (General)
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Refrences
Title Journal Journal Categories Citations Publication Date
vertically driven microactuators by electrothermal buckling effects 1998
force measurements of polysilicon thermal microactuators 1996
lateral post-buckling analysis of beams 1993
localized silicon fusion and eutetic bonding for mems fabrication and packaging 1998
surface micromachined polysilicon thermal actuator arrays and applications 1996
Citations
Title Journal Journal Categories Citations Publication Date
Broadband 1 x 4 Silicon Nitride Photonic Switch Fabricated on a Hybrid Electrothermal and Electrostatic MEMS Platform Journal of Lightwave Technology
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Electric apparatus and materials. Electric circuits. Electric networks
  • Science: Physics: Optics. Light
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Telecommunication
  • Technology: Engineering (General). Civil engineering (General): Applied optics. Photonics
  • Science: Physics: Acoustics. Sound
  • Science: Physics: Optics. Light
  • Technology: Engineering (General). Civil engineering (General)
 2 2023
Dynamic analysis of straight stepped microbeams International Journal of Non-Linear Mechanics
  • Technology: Mechanical engineering and machinery
  • Technology: Engineering (General). Civil engineering (General): Mechanics of engineering. Applied mechanics
 5 2021
Surface-Micromachined Silicon Carbide Pirani Gauges for Harsh Environments IEEE Sensors Journal
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Electric apparatus and materials. Electric circuits. Electric networks
  • Science: Mathematics: Instruments and machines
  • Science: Physics
  • Technology: Engineering (General). Civil engineering (General)
 1 2021
The buckling and deflection studies of micro-electro-mechanical column and beam structures containing fixed-charges Mechanics of Materials
  • Science: Chemistry
  • Technology: Engineering (General). Civil engineering (General): Mechanics of engineering. Applied mechanics
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
 3 2020
Full Electrostatic Control of Nanomechanical Buckling Physical Review Letters
  • Science: Chemistry: Physical and theoretical chemistry
  • Science: Physics
  • Science: Physics
 2020
Citations Analysis
Category Category Repetition
Technology: Electrical engineering. Electronics. Nuclear engineering: Electric apparatus and materials. Electric circuits. Electric networks41
Technology: Chemical technology40
Science: Physics38
Technology: Engineering (General). Civil engineering (General)36
Science: Mathematics: Instruments and machines32
Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials17
Science: Chemistry12
Technology: Mechanical engineering and machinery6
Science: Physics: Optics. Light6
Technology: Electrical engineering. Electronics. Nuclear engineering: Electronics6
Science: Chemistry: Physical and theoretical chemistry5
Technology: Engineering (General). Civil engineering (General): Mechanics of engineering. Applied mechanics5
Technology: Chemical technology: Clay industries. Ceramics. Glass2
Technology: Technology (General): Industrial engineering. Management engineering2
Technology: Mining engineering. Metallurgy1
Technology: Electrical engineering. Electronics. Nuclear engineering: Telecommunication1
Technology: Engineering (General). Civil engineering (General): Applied optics. Photonics1
Science: Physics: Acoustics. Sound1
Technology: Manufactures1
The category Technology: Electrical engineering. Electronics. Nuclear engineering: Electric apparatus and materials. Electric circuits. Electric networks 41 is the most commonly referenced area in studies that cite this article. The first research to cite this article was titled Mechanical and thermophysical properties of PECVD oxynitride films measured by MEMS and was published in 2001. The most recent citation comes from a 2023 study titled Broadband 1 x 4 Silicon Nitride Photonic Switch Fabricated on a Hybrid Electrothermal and Electrostatic MEMS Platform. This article reached its peak citation in 2007, with 8 citations. It has been cited in 32 different journals. Among related journals, the Journal of Microelectromechanical Systems cited this research the most, with 12 citations. The chart below illustrates the annual citation trends for this article.
Citations used this article by year