Mechanical and thermophysical properties of PECVD oxynitride films measured by MEMS

Article Properties
Refrences
Title Journal Journal Categories Citations Publication Date
Self-buckling of micromachined beams under resistive heating Journal of Microelectromechanical Systems
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Electric apparatus and materials. Electric circuits. Electric networks
  • Technology: Chemical technology
  • Science: Mathematics: Instruments and machines
  • Science: Physics
  • Technology: Engineering (General). Civil engineering (General)
70 2000
10.1016/S0924-4247(98)00325-2 1999
10.1016/S0040-6090(98)01021-9 Thin Solid Films
  • Science: Chemistry
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
  • Science: Physics
  • Science: Physics
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
  • Technology: Chemical technology
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
1998
10.1016/S0022-3093(96)00650-3 Journal of Non-Crystalline Solids
  • Technology: Chemical technology: Clay industries. Ceramics. Glass
  • Science: Chemistry
  • Technology: Chemical technology
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
  • Science: Physics
1997
SBMicro, Proceedings of XV International Conference on Microelectronics and Packaging, Manaus, Brazil, September 18–23 2000