Surface-Micromachined Silicon Carbide Pirani Gauges for Harsh Environments

Article Properties
Journal Categories
Science
Mathematics
Instruments and machines
Science
Physics
Technology
Electrical engineering
Electronics
Nuclear engineering
Electric apparatus and materials
Electric circuits
Electric networks
Technology
Engineering (General)
Civil engineering (General)
You May Also Like
Refrences
Title Journal Journal Categories Citations Publication Date
10.1002/9781118313534 2014
Mechanical Robustness and Hermeticity Monitoring for MEMS Thin Film Encapsulation 2011
10.1109/LED.2014.2379262
A novel SOI pressure sensor for high temperature application Journal of Semiconductors
  • Science: Physics
 20 2015
10.1016/0925-9635(94)05231-X
Citations
Title Journal Journal Categories Citations Publication Date
Surface Micromachined CMOS-MEMS Pirani Vacuum Gauge With Stacked Temperature Sensor Journal of Microelectromechanical Systems
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Electric apparatus and materials. Electric circuits. Electric networks
  • Technology: Chemical technology
  • Science: Mathematics: Instruments and machines
  • Science: Physics
  • Technology: Engineering (General). Civil engineering (General)
 2024
Citations Analysis
Category Category Repetition
Technology: Electrical engineering. Electronics. Nuclear engineering: Electric apparatus and materials. Electric circuits. Electric networks1
Technology: Chemical technology1
Science: Mathematics: Instruments and machines1
Science: Physics1
Technology: Engineering (General). Civil engineering (General)1
The category Technology: Electrical engineering. Electronics. Nuclear engineering: Electric apparatus and materials. Electric circuits. Electric networks 1 is the most commonly referenced area in studies that cite this article. The first research to cite this article was titled Surface Micromachined CMOS-MEMS Pirani Vacuum Gauge With Stacked Temperature Sensor and was published in 2024. The most recent citation comes from a 2024 study titled Surface Micromachined CMOS-MEMS Pirani Vacuum Gauge With Stacked Temperature Sensor. This article reached its peak citation in 2024, with 1 citations. It has been cited in 1 different journals. Among related journals, the Journal of Microelectromechanical Systems cited this research the most, with 1 citations. The chart below illustrates the annual citation trends for this article.
Citations used this article by year