Journal of Microelectromechanical Systems

Title Publication Date Language Citations
Magnetically actuated, addressable microstructures1997/01/01158
Three-dimensional microfabrication by localized electrochemical deposition1996/03/01158
Pull-in study of an electrostatic torsion microactuator1998/01/01155
Fabrication and characterization of hydrogel-based microvalves2002/01/01150
The anharmonic Casimir oscillator (ACO)-the Casimir effect in a model microelectromechanical system1995/01/01148
Optomechanical uncooled infrared imaging system: design, microfabrication, and performance2002/04/01139
Thermal conductivity of doped polysilicon layers2001/01/01138
Working equations for piezoelectric actuators and sensors1999/01/01138
A six-wafer combustion system for a silicon micro gas turbine engine2000/12/01135
Microelectromechanical filters for signal processing1998/01/01135
TiNi (shape memory) films silicon for MEMS applications1995/01/01134
High-cycle fatigue of single-crystal silicon thin films2001/01/01134
Electrostatic curved electrode actuators1997/01/01132
A methodology and model for the pull-in parameters of electrostatic actuators2001/01/01131
A traction stress sensor array for use in high-resolution robotic tactile imaging2000/12/01130
Low temperature wafer direct bonding1994/03/01130
On a tunable bistable MEMS-theory and experiment2000/06/01129
Micromechanical switches fabricated using nickel surface micromachining1997/03/01128
Micromachined flat-walled valveless diffuser pumps1997/06/01127
Measurements and modeling of two-phase flow in microchannels with nearly constant heat flux boundary conditions2002/01/01125
Micromachined electrodes for biopotential measurements2001/03/01125
Two-photon-absorbed near-infrared photopolymerization for three-dimensional microfabrication1998/01/01124
Silicon-processed microneedles1999/03/01124
1/f noise considerations for the design and process optimization of piezoresistive cantilevers2000/06/01122
Silicon-micromachined scanning confocal optical microscope1998/03/01122
Investigation of high-temperature degradation of platinum thin films with an in situ resistance measurement apparatus1998/03/01121
A micromachined piezoelectric tactile sensor for an endoscopic grasper-theory, fabrication and experiments2000/09/01121
A new analytical solution for the load-deflection of square membranes1995/01/01120
Piezoelectric micromotors for microrobots1992/03/01120
Effect of specimen size on Young's modulus and fracture strength of polysilicon2001/01/01120