Comb-drive actuators for large displacements

Article Properties
Journal Categories
Science
Mathematics
Instruments and machines
Science
Physics
Technology
Chemical technology
Technology
Electrical engineering
Electronics
Nuclear engineering
Electric apparatus and materials
Electric circuits
Electric networks
Technology
Engineering (General)
Civil engineering (General)
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Refrences
Title Journal Journal Categories Citations Publication Date
Anisotropic Reactive Ion Etching of Silicon Using  SF 6 /  O 2 /  CHF 3 Gas Mixtures Journal of The Electrochemical Society
  • Science: Chemistry
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
  • Science: Chemistry: Physical and theoretical chemistry
 100 1995
Microfabricated tools for nanoscience Journal of Micromechanics and Microengineering
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Electric apparatus and materials. Electric circuits. Electric networks
  • Technology: Chemical technology
  • Science: Mathematics: Instruments and machines
  • Science: Physics
  • Technology: Engineering (General). Civil engineering (General)
 6 1993
Micromechanical comb actuators with low driving voltage Journal of Micromechanics and Microengineering
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Electric apparatus and materials. Electric circuits. Electric networks
  • Technology: Chemical technology
  • Science: Mathematics: Instruments and machines
  • Science: Physics
  • Technology: Engineering (General). Civil engineering (General)
 51 1992
10.1109/JMEMS.1992.752508 1992
10.1109/JMEMS.1992.752508 1995
Citations
Title Journal Journal Categories Citations Publication Date
Design and simulation of a tunable comb-drive actuator with a wide frequency tuning range and low pull-in voltage

 Physica Scripta
  • Science: Physics
  • Science: Physics
 2024
Multi Degrees-of-Freedom Hybrid Piezoelectric-Electrostatic MEMS Actuators Integrated With Displacement Sensors Journal of Microelectromechanical Systems
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Electric apparatus and materials. Electric circuits. Electric networks
  • Technology: Chemical technology
  • Science: Mathematics: Instruments and machines
  • Science: Physics
  • Technology: Engineering (General). Civil engineering (General)
 2024
Driving Principle and Stability Analysis of Vertical Comb-Drive Actuator for Scanning Micromirrors

 Micromachines
  • Technology: Mechanical engineering and machinery
  • Science: Chemistry: Analytical chemistry
  • Technology: Chemical technology
  • Science: Mathematics: Instruments and machines
  • Science: Physics
  • Technology: Engineering (General). Civil engineering (General)
 1 2024
Highly Selective Tilted Triangular Springs with Constant Force Reaction

 Sensors
  • Technology: Chemical technology
  • Science: Chemistry: Analytical chemistry
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Electric apparatus and materials. Electric circuits. Electric networks
  • Science: Mathematics: Instruments and machines
  • Science: Chemistry: Analytical chemistry
  • Science: Chemistry
 2024
Review on ultra-lightweight flapping-wing nano air vehicles: Artificial muscles, flight control mechanism, and biomimetic wings Chinese Journal of Aeronautics
  • Technology: Motor vehicles. Aeronautics. Astronautics
  • Technology: Engineering (General). Civil engineering (General)
 8 2023
Citations Analysis
Category Category Repetition
Technology: Chemical technology209
Science: Physics199
Technology: Engineering (General). Civil engineering (General)198
Technology: Electrical engineering. Electronics. Nuclear engineering: Electric apparatus and materials. Electric circuits. Electric networks184
Science: Mathematics: Instruments and machines179
Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials71
Science: Chemistry48
Technology: Mechanical engineering and machinery42
Science: Physics: Optics. Light34
Technology: Electrical engineering. Electronics. Nuclear engineering: Electronics24
Science: Chemistry: Analytical chemistry23
Technology: Engineering (General). Civil engineering (General): Applied optics. Photonics18
Technology: Engineering (General). Civil engineering (General): Mechanics of engineering. Applied mechanics16
Science: Chemistry: Physical and theoretical chemistry12
Science: Physics: Acoustics. Sound12
Technology: Manufactures10
Science: Mathematics5
Science: Mathematics: Instruments and machines: Electronic computers. Computer science5
Science: Chemistry: General. Including alchemy4
Science: Science (General)4
Science4
Science: Physics: Heat: Thermodynamics3
Technology: Technology (General): Industrial engineering. Management engineering: Information technology3
Technology: Electrical engineering. Electronics. Nuclear engineering: Telecommunication3
Medicine3
Technology: Electrical engineering. Electronics. Nuclear engineering: Electronics: Computer engineering. Computer hardware3
Science: Mathematics: Instruments and machines: Electronic computers. Computer science: Computer software3
Technology: Electrical engineering. Electronics. Nuclear engineering: Production of electric energy or power. Powerplants. Central stations3
Technology: Chemical technology: Chemical engineering2
Education: Education (General)2
Technology: Technology (General): Industrial engineering. Management engineering: Applied mathematics. Quantitative methods2
Science: Science (General): Cybernetics: Information theory2
Science: Physics: Nuclear and particle physics. Atomic energy. Radioactivity1
Science: Physics: Atomic physics. Constitution and properties of matter1
Science: Biology (General)1
Technology: Technology (General): Industrial engineering. Management engineering1
Technology: Electrical engineering. Electronics. Nuclear engineering1
Technology: Mining engineering. Metallurgy1
Science: Chemistry: Organic chemistry: Biochemistry1
Technology: Motor vehicles. Aeronautics. Astronautics1
Science: Physics: Electricity and magnetism: Electricity: Plasma physics. Ionized gases1
Science: Physics: Descriptive and experimental mechanics1
Technology: Chemical technology: Biotechnology1
Medicine: Medicine (General): Medical technology1
Medicine: Medicine (General)1
Technology1
The category Technology: Chemical technology 209 is the most commonly referenced area in studies that cite this article. The first research to cite this article was titled A smart material microamplification mechanism fabricated using LIGA and was published in 1998. The most recent citation comes from a 2024 study titled Highly Selective Tilted Triangular Springs with Constant Force Reaction. This article reached its peak citation in 2006, with 27 citations. It has been cited in 117 different journals, 15% of which are open access. Among related journals, the Journal of Microelectromechanical Systems cited this research the most, with 61 citations. The chart below illustrates the annual citation trends for this article.
Citations used this article by year