Journal of Microelectromechanical Systems

Title Publication Date Language Citations
Piezoelectric microphone with on-chip CMOS circuits1993/01/0173
Electroosmotic flow control in complex microgeometries2002/01/0173
A bidirectional magnetic microactuator using electroplated permanent magnet arrays2002/01/0173
Computer-aided generation of nonlinear reduced-order dynamic macromodels. I. Non-stress-stiffened case2000/06/0171
Self-buckling of micromachined beams under resistive heating2000/03/0170
Plastic deformation of nanometric single crystal silicon wire in AFM bending test at intermediate temperatures2002/04/0169
Subcritical crack growth in silicon MEMS1999/01/0169
A silicon resonant sensor structure for Coriolis mass-flow measurements1997/06/0169
A system for the dynamic characterization of microstructures1997/01/0169
Thermally actuated microprobes for a new wafer probe card1999/03/0168
Design, fabrication, and testing of a bistable electromagnetically actuated microvalve2000/06/0168
Surface tension powered self-assembly of 3-D micro-optomechanical structures1999/01/0168
Piezoelectric cantilever microphone and microspeaker1996/01/0168
Post-CMOS processing for high-aspect-ratio integrated silicon microstructures2002/04/0167
A micro strain gauge with mechanical amplifier1997/01/0167
Transient liquid crystal thermometry of microfabricated PCR vessel arrays1998/01/0166
A miniaturized high-voltage solar cell array as an electrostatic MEMS power supply1995/01/0166
Mechanical properties of thin films from the load deflection of long clamped plates1998/01/0166
Dry release for surface micromachining with HF vapor-phase etching1997/01/0166
A simulation program for the sensitivity and linearity of piezoresistive pressure sensors1999/01/0166
A conveyance system using air flow based on the concept of distributed micro motion systems1994/06/0165
Surface micromachined piezoelectric accelerometers (PiXLs)2001/06/0165
A bulk silicon dissolved wafer process for microelectromechanical devices1992/06/0164
Lateral MEMS microcontact considerations1999/01/0163
Magnetic actuation of hinged microstructures1999/03/0163
An all-silicon single-wafer micro-g accelerometer with a combined surface and bulk micromachining process2000/12/0162
Design considerations of rectangular electrostatic torsion actuators based on new analytical pull-in expressions2002/01/0162
Magnetic and mechanical properties of micromachined strontium ferrite/polyimide composites1997/01/0161
Analytical modeling of electrostatic membrane actuator for micro pumps1999/01/0161
High-aspect-ratio photolithography for MEMS applications1995/01/0161