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Journal of Micromechanics and Microengineering
Title
Publication Date
Language
Citations
The development of a high-performance perfluorinated polymer electret and its application to micro power generation
2008/09/29
167
A new approach to the modeling and simulation of flexible microstructures under the effect of squeeze-film damping
2003/10/17
163
Micro hot embossing of thermoplastic polymers: a review
2013/12/12
163
Modeling and simulations of thermoelastic damping in microplates
2004/09/24
161
Analysis of tip deflection and force of a bimetallic cantilever microactuator
1993/03/01
159
Fabrication of multi-layer SU-8 microstructures
2006/01/09
159
Design and fabrication of artificial lateral line flow sensors
2002/06/24
158
A thermal actuator for nanoscalein situmicroscopy testing: design and characterization
2006/01/05
158
Nanonewton force-controlled manipulation of biological cells using a monolithic MEMS microgripper with two-axis force feedback
2008/04/01
157
Capacitive micromachined ultrasonic transducers for medical imaging and therapy
2011/04/28
155
Self-assembly from milli- to nanoscales: methods and applications
2009/07/08
154
Efficient spatial-temporal chaotic mixing in microchannels
2003/04/11
154
The hydrodynamic focusing effect inside rectangular microchannels
2006/04/07
151
A physical model to predict stiction in MEMS
2002/08/12
151
Microfluidic systems with on-line UV detection fabricated in photodefinable epoxy
2001/04/20
150
A batch-fabricated and electret-free silicon electrostatic vibration energy harvester
2009/10/12
149
Photopolymers with tunable mechanical properties processed by laser-based high-resolution stereolithography
2008/11/06
149
Review of piezoelectric micromachined ultrasonic transducers and their applications
2017/09/22
148
Stability of the hydrophilic behavior of oxygen plasma activated SU-8
2007/02/09
147
Post buckling of micromachined beams
1994/09/01
146
Polymerization optimization of SU-8 photoresist and its applications in microfluidic systems and MEMS
2000/11/30
145
Impact of polymer film thickness and cavity size on polymer flow during embossing: toward process design rules for nanoimprint lithography
2005/11/21
143
Dynamics of MEMS resonators under superharmonic and subharmonic excitations
2005/08/09
142
Rapid prototyping of microfluidic chips in COC
2007/01/11
141
Energy transfer model for squeeze-film air damping in low vacuum
2002/04/22
140
Characterization of electrowetting actuation on addressable single-side coplanar electrodes
2006/08/25
139
A novel passive micromixer based on unbalanced splits and collisions of fluid streams
2010/04/07
137
Rapid prototyping of microfluidic switches in poly(dimethyl siloxane) and their actuation by electro-osmotic flow
1999/08/27
137
A closed-form model for the pull-in voltage of electrostatically actuated cantilever beams
2005/02/15
134
Parylene-based electret power generators
2008/09/29
134
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