Journal of Micromechanics and Microengineering

Title Publication Date Language Citations
MEMS actuators and sensors: observations on their performance and selection for purpose2005/06/20225
Determining mean and gradient residual stresses in thin films using micromachined cantilevers1996/09/01221
A passive planar micromixer with obstructions for mixing at low Reynolds numbers2007/04/17221
Thickness-dependent mechanical properties of polydimethylsiloxane membranes2009/02/23220
A wideband vibration-based energy harvester2008/10/07219
Electrostatic micro power generation from low-frequency vibration such as human motion2009/08/26218
Wafer level packaging of MEMS2008/05/29214
Black silicon method: X. A review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as a roadmap to next generation equipment2009/02/02209
Efficiency of energy conversion for a piezoelectric power harvesting system2006/09/29208
Microfabrication of PPy microactuators and other conjugated polymer devices1999/01/01206
The TiNi shape-memory alloy and its applications for MEMS1998/09/01205
The pull-in behavior of electrostatically actuated bistable microstructures2008/04/15204
A MEMS electret generator with electrostatic levitation for vibration-driven energy-harvesting applications2010/09/14202
Characterization of different beam shapes for piezoelectric energy harvesting2008/09/29196
Analysis and design of polysilicon thermal flexure actuator1999/01/01195
Liquid flow in microchannels: experimental observations and computational analyses of microfluidics effects2003/05/14195
A new fabrication process for ultra-thick microfluidic microstructures utilizing SU-8 photoresist2002/06/21193
Electrokinetic microchannel battery by means of electrokinetic and microfluidic phenomena2003/10/20190
Electroosmotic pumping and electrophoretic separations for miniaturized chemical analysis systems1994/12/01188
Micro electrochemical milling2004/10/16187
Equivalent circuit representation of electromechanical transducers: I. Lumped-parameter systems1996/03/01186
A fast prototyping process for fabrication of microfluidic systems on soda-lime glass2001/10/12182
Efficiency of energy conversion for devices containing a piezoelectric component2004/03/18178
Development of a microfluidic device for fluorescence activated cell sorting2002/06/14177
High-speed and drop-on-demand printing with a pulsed electrohydrodynamic jet2010/08/20176
Pneumatic and hydraulic microactuators: a review2010/03/19176
Resonant silicon sensors1991/06/01175
Development of polyimide flexible tactile sensor skin2003/02/24172
A barrier embedded chaotic micromixer2004/04/20171
A modular microfluid system with an integrated micromixer1996/03/01168