Plasma Chemistry and Plasma Processing

Title Publication Date Language Citations
The importance of electron-molecule interactions in free-free continuum emission for microwave discharge CVD1997/09/01English
Effects of process parameters on ultrafine SiC synthesis using induction plasmas1997/06/01English
Drag on an ellipsoid particle in free-molecular plasma flow1997/03/01English
Reactions of hydrocarbons in a supersonic vacuum plasma jet1997/06/01English
The effect of a carbon-carbon double bond on electron beam-generated plasma decomposition of trichloroethylene and 1,1,1-trichloroethane1997/03/01English
Plasma etching of III–V semiconductors in BCl3 chemistries: Part II: InP and related compounds1997/06/01English
Heat transfer in RF plasma sintering: Modeling and experiments1997/09/01English
Plasma etching of III–V semiconductors in BCl3 chemistries: Part I: GaAs and related compounds1997/06/01English
Improvement of plasma spraying efficiency and coating quality1997/03/01English
Characterization of an argon-hydrogen microwave discharge used as an atomic hydrogen source. Effect of hydrogen dilution on the atomic hydrogen production1997/06/01English
DC plasma polymerization of hexamethyldisiloxane1997/06/01English
Experimental check of the high-frequency behavior of the electrons in molecular and atomic gas plasmas1997/09/01English
Energy efficiency of NO removal by pulsed corona discharges1996/06/01English
Surface recombination in breakdown time delay experiments: Effect of different cathode materials1996/06/01English
Numerical simulation of a nonequilibrium plasma jet in an applied magnetic field using three-fluid model1996/06/01English
Homogeneous nucleation of metals in a plasma-quench reactor1996/06/01English
Effect of a substrate on the temperature distribution in an argon-hydrogen thermal plasma jet1994/12/01English
Volumetric emission of argon plasmas in the presence of vapors of Fe, Si, and Al1994/12/01English
On the plasma chemistry of the C/H system relevant to diamond deposition processes1996/06/01English
Low-temperature dry etching of tungsten, dielectric, and trilevel resist layers on GaAs1994/12/01English
Plasma and beam facility atomic oxygen erosion of a transition metal complex1996/06/01English
Synergistic effects of catalysts and plasmas on the synthesis of ammonia and hydrazine1994/12/01English
Electron energy distribution functions and rate and transport coefficients of H2/H/CH4 reactive plasmas for diamond film deposition1996/06/01English
Kinetics of O2 + TEOS gas-phase chemical reactions in a remote RF plasma reactor with electron spin resonance1996/06/01English
Growth rate studies of CVD diamond in an RF plasma torch1994/12/01English
Unsteadiness and mixing in thermal plasma jets1994/12/01English
Comparison of reaction rates for helium plasmas calculated using nonequilibrium and equilibrium electron energy distribution functions1995/03/01English
Drag force acting on an evaporating particle immersed in a rarefied plasma flow1995/03/01English
A two-fluid model of turbulence for a thermal plasma jet1995/03/01English
CARS diagnostics of acetylene formation in a plasma test reactor for hydrocarbon synthesis1995/03/01English