MEMS-Micropumps: A Review

Article Properties
  • Language
    English
  • DOI (url)
  • Publication Date
    2002/05/28
  • Indian UGC (Journal)
  • Refrences
    85
  • Citations
    353
  • Nam-Trung Nguyen School of Mechanical and Production Engineering, Nanyang Technological University, Singapore 639798
  • Xiaoyang Huang School of Mechanical and Production Engineering, Nanyang Technological University, Singapore 639798
  • Toh Kok Chuan School of Mechanical and Production Engineering, Nanyang Technological University, Singapore 639798
Abstract
Cite
Nguyen, Nam-Trung, et al. “MEMS-Micropumps: A Review”. Journal of Fluids Engineering, vol. 124, no. 2, 2002, pp. 384-92, https://doi.org/10.1115/1.1459075.
Nguyen, N.-T., Huang, X., & Chuan, T. K. (2002). MEMS-Micropumps: A Review. Journal of Fluids Engineering, 124(2), 384-392. https://doi.org/10.1115/1.1459075
Nguyen NT, Huang X, Chuan TK. MEMS-Micropumps: A Review. Journal of Fluids Engineering. 2002;124(2):384-92.
Journal Categories
Technology
Engineering (General)
Civil engineering (General)
Technology
Mechanical engineering and machinery
Description

Need a tiny pump for your microfluidic device? This review provides a comprehensive overview of MEMS-based micropumps, critical components in the expanding field of microfluidics. Outlining various micropump principles and their realization using MEMS technology, it offers a systematic guide for researchers and engineers. It outlines systematically the pump principles and their realization with MEMS-technology. Comparisons regarding pump size, flow rate, and backpressure will help readers to decide their proper design before starting a microfluidics project. Different pump principles are compared graphically and discussed in terms of their advantages and disadvantages for particular applications. Unlike other review papers on microfluidic devices, this one focuses solely on micropumps. It aids in selecting appropriate designs by comparing pump size, flow rate, and backpressure. The paper compares different pump principles graphically, discussing the advantages and disadvantages for specific applications. This resource is invaluable for anyone involved in microfluidics projects, offering practical insights for effective micropump design and selection.

Published in the Journal of Fluids Engineering, this review directly aligns with the journal's focus on fluid mechanics and its applications in engineering systems. The detailed overview of MEMS-micropumps and their performance characteristics is highly relevant to the journal's audience of researchers and engineers in fluid dynamics and microfluidics.

Refrences
Citations
Citations Analysis
The first research to cite this article was titled POLYMERIC STACK-ASSEMBLED MICROPUMP WITH SU-8 CHECK VALVES and was published in 2003. The most recent citation comes from a 2024 study titled POLYMERIC STACK-ASSEMBLED MICROPUMP WITH SU-8 CHECK VALVES . This article reached its peak citation in 2009 , with 28 citations.It has been cited in 161 different journals, 8% of which are open access. Among related journals, the Journal of Micromechanics and Microengineering cited this research the most, with 32 citations. The chart below illustrates the annual citation trends for this article.
Citations used this article by year