Flexure-based X-Y micro-motion mechanism used in lithographic lens
Article Properties
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LanguageEnglish
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DOI (url)
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Publication Date2013/01/01
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Journal
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Indian UGC (journal)
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Citations1
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赵磊 ZHAO Lei
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巩岩 GONG Yan
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赵阳 ZHAO Yang
Cite
ZHAO Lei 赵磊, et al. “Flexure-Based X-Y Micro-Motion Mechanism Used in Lithographic Lens”. Optics and Precision Engineering, vol. 21, no. 6, 2013, pp. 1425-33, https://doi.org/10.3788/ope.20132106.1425.
ZHAO Lei 赵., GONG Yan 巩., & ZHAO Yang 赵. (2013). Flexure-based X-Y micro-motion mechanism used in lithographic lens. Optics and Precision Engineering, 21(6), 1425-1433. https://doi.org/10.3788/ope.20132106.1425
ZHAO Lei 赵, GONG Yan 巩, ZHAO Yang 赵. Flexure-based X-Y micro-motion mechanism used in lithographic lens. Optics and Precision Engineering. 2013;21(6):1425-33.
Citations
| Title | Journal | Journal Categories | Citations | Publication Date |
|---|---|---|---|---|
Fuzzy multi-objective optimization for movement performance of deep-notch elliptical flexure hinges | Review of Scientific Instruments |
| 7 | 2015 |
Citations Analysis
| Category | Category Repetition |
|---|---|
| Science: Mathematics: Instruments and machines | 1 |
| Science: Physics | 1 |
| Science: Chemistry: Analytical chemistry | 1 |
| Science: Chemistry | 1 |
The category
Science: Mathematics: Instruments and machines 1
is the most commonly referenced area in studies that cite this article.