基于傅里叶合成技术的光刻照明系统研究

Article Properties
  • Language
    English
  • DOI (url)
    10.3788/cjl221221
  • Publication Date
    2023/01/01
  • Journal
    Chinese Journal of Lasers
  • Indian UGC (journal)
  • Refrences
    36
  • 李慧 Li Hui
  • 吴晓斌 Wu Xiaobin
  • 韩晓泉 Han Xiaoquan
  • 马赫 Ma He
  • 沙鹏飞 Sha Pengfei
Cite
Li Hui 李慧, et al. “基于傅里叶合成技术的光刻照明系统研究”. Chinese Journal of Lasers, vol. 50, no. 6, 2023, p. 0605003, https://doi.org/10.3788/cjl221221.
Li Hui 李., Wu Xiaobin 吴., Han Xiaoquan 韩., Ma He 马., & Sha Pengfei 沙. (2023). 基于傅里叶合成技术的光刻照明系统研究. Chinese Journal of Lasers, 50(6), 0605003. https://doi.org/10.3788/cjl221221
Li Hui 李慧, Wu Xiaobin 吴晓斌, Han Xiaoquan 韩晓泉, Ma He 马赫, and Sha Pengfei 沙鹏飞. “基于傅里叶合成技术的光刻照明系统研究”. Chinese Journal of Lasers 50, no. 6 (2023): 0605003. https://doi.org/10.3788/cjl221221.
1.
Li Hui 李, Wu Xiaobin 吴, Han Xiaoquan 韩, Ma He 马, Sha Pengfei 沙. 基于傅里叶合成技术的光刻照明系统研究. Chinese Journal of Lasers. 2023;50(6):0605003.
Journal Category
Science
Physics
Optics
Light
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  • Science: Physics: Optics. Light
 2022
光场相干测量及其在计算成像中的应用 Laser & Optoelectronics Progress
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Electric apparatus and materials. Electric circuits. Electric networks
  • Science: Physics: Optics. Light
 3 2021
光刻机照明光场强度分布校正技术研究 Chinese Journal of Lasers
  • Science: Physics: Optics. Light
 2021
Angular position distribution algorithm of micro mirror array based on genetic algorithm 2020
Angular Position Distribution Algorithm of Micro Mirror Array Based on Genetic Algorithm Chinese Journal of Lasers
  • Science: Physics: Optics. Light
 1 2020
Refrences Analysis
Category Category Repetition
Science: Physics: Optics. Light8
Science: Physics3
Technology: Electrical engineering. Electronics. Nuclear engineering: Electric apparatus and materials. Electric circuits. Electric networks2
Technology: Chemical technology2
Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials2
Technology: Engineering (General). Civil engineering (General): Applied optics. Photonics1
Science: Physics: Acoustics. Sound1
The category Science: Physics: Optics. Light 8 is the most frequently represented among the references in this article. It primarily includes studies from Acta Optica Sinica and Laser & Optoelectronics Progress. The chart below illustrates the number of referenced publications per year.
Refrences used by this article by year