An Optical MEMS Acoustic Sensor Based on Grating Interferometer

Article Properties
  • Language
    English
  • DOI (url)
    10.3390/s19071503
  • Publication Date
    2019/03/28
  • Journal
    Sensors
  • Indian UGC (journal)
  • Refrences
    24
  • Citations
    13
  • Mengying Zhang
  • Gaomi Wu
  • Dipeng Ren
  • Ran Gao
  • Zhi-Mei Qi
  • Xingdong Liang
Abstract
Cite
Zhang, Mengying, et al. “An Optical MEMS Acoustic Sensor Based on Grating Interferometer”. Sensors, vol. 19, no. 7, 2019, p. 1503, https://doi.org/10.3390/s19071503.
Zhang, M., Wu, G., Ren, D., Gao, R., Qi, Z.-M., & Liang, X. (2019). An Optical MEMS Acoustic Sensor Based on Grating Interferometer. Sensors, 19(7), 1503. https://doi.org/10.3390/s19071503
Zhang M, Wu G, Ren D, Gao R, Qi ZM, Liang X. An Optical MEMS Acoustic Sensor Based on Grating Interferometer. Sensors. 2019;19(7):1503.
Journal Categories
Science
Chemistry
Science
Chemistry
Analytical chemistry
Science
Mathematics
Instruments and machines
Technology
Chemical technology
Technology
Electrical engineering
Electronics
Nuclear engineering
Electric apparatus and materials
Electric circuits
Electric networks
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An SOI-MEMS Acoustic Sensor Based on Optical Grating Interferometer IEEE Sensors Journal
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Citations Analysis
Category Category Repetition
Technology: Chemical technology8
Technology: Electrical engineering. Electronics. Nuclear engineering: Electric apparatus and materials. Electric circuits. Electric networks7
Science: Physics: Optics. Light6
Science: Chemistry: Analytical chemistry5
Science: Mathematics: Instruments and machines5
Technology: Engineering (General). Civil engineering (General): Applied optics. Photonics5
Science: Chemistry4
Science: Physics: Acoustics. Sound4
Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials4
Science: Physics4
Technology: Engineering (General). Civil engineering (General)3
Technology: Electrical engineering. Electronics. Nuclear engineering: Telecommunication2
Technology: Electrical engineering. Electronics. Nuclear engineering: Electronics2
Technology: Mechanical engineering and machinery2
Technology: Electrical engineering. Electronics. Nuclear engineering1
Science: Science (General): Cybernetics: Information theory1
The category Technology: Chemical technology 8 is the most commonly referenced area in studies that cite this article. The first research to cite this article was titled High-precision microdisplacement sensor based on zeroth-order diffraction using a single-layer optical grating and was published in 2019. The most recent citation comes from a 2023 study titled A Grating Interferometric Acoustic Sensor Based on a Flexible Polymer Diaphragm. This article reached its peak citation in 2023, with 5 citations. It has been cited in 8 different journals, 50% of which are open access. Among related journals, the Sensors cited this research the most, with 4 citations. The chart below illustrates the annual citation trends for this article.
Citations used this article by year