Deposition Process Using a Shunting Arc Discharge

Article Properties
Refrences
Title Journal Journal Categories Citations Publication Date
A New Solid Plasma Souece,Shunting Arc. The Journal of The Institute of Electrical Engineers of Japan 2 2003
10.1016/S0168-583X(03)00851-6 2003
Shunting Arc Generation of a Heated Wire in a Low Pressure Gas =Fundamental Research of Pulsed Ion Source= IEEJ Transactions on Fundamentals and Materials 3 1998
Shunting Arc Generation of a Heated Wire in a Low Pressure Gas =Fundamental Research of Pulsed Ion Source= Review of Scientific Instruments
  • Science: Mathematics: Instruments and machines
  • Science: Physics
  • Science: Chemistry: Analytical chemistry
  • Science: Chemistry
2002
Shunting Arc Generation of a Heated Wire in a Low Pressure Gas =Fundamental Research of Pulsed Ion Source= Surface and Coatings Technology
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
  • Science: Physics
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
2002