Design and Fabrication of Quartz MEMS-based Monolithic Vibrating Beam Accelerometer

Article Properties
Journal Categories
Science
Chemistry
Science
Mathematics
Instruments and machines
Technology
Electrical engineering
Electronics
Nuclear engineering
Materials of engineering and construction
Mechanics of materials
Technology
Technology (General)
Citations
Title Journal Journal Categories Citations Publication Date
Design, fabrication, and characterization of a high-sensitivity integrated quartz vibrating beam accelerometer

Review of Scientific Instruments
  • Science: Mathematics: Instruments and machines
  • Science: Physics
  • Science: Chemistry: Analytical chemistry
  • Science: Chemistry
2024
An All-Quartz Integrated Resonant Accelerometer With High Sensitivity and Stability: Design, Fabrication, and Measurement IEEE Sensors Journal
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Electric apparatus and materials. Electric circuits. Electric networks
  • Science: Mathematics: Instruments and machines
  • Science: Physics
  • Technology: Engineering (General). Civil engineering (General)
2024
Citations Analysis
The category Science: Mathematics: Instruments and machines 1 is the most commonly referenced area in studies that cite this article. The first research to cite this article was titled Design, fabrication, and characterization of a high-sensitivity integrated quartz vibrating beam accelerometer and was published in 2024. The most recent citation comes from a 2024 study titled Design, fabrication, and characterization of a high-sensitivity integrated quartz vibrating beam accelerometer. This article reached its peak citation in 2024, with 2 citations. It has been cited in 2 different journals. Among related journals, the Review of Scientific Instruments cited this research the most, with 1 citations. The chart below illustrates the annual citation trends for this article.
Citations used this article by year