Tailoring of Stress Development in MEMS Packaging Systems
Article Properties
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LanguageEnglish
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DOI (url)
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Publication Date2002/01/01
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Journal
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Indian UGC (journal)
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Refrences14
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Satyajit S. Walwadkar
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Junghyun Cho
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P.W. Farrell
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Lawrence E. Felton
Abstract
Cite
Walwadkar, Satyajit S., et al. “Tailoring of Stress Development in MEMS Packaging Systems”. MRS Online Proceedings Library, vol. 741, 2002, https://doi.org/10.1557/proc-741-j5.22.
Walwadkar, S. S., Cho, J., Farrell, P., & Felton, L. E. (2002). Tailoring of Stress Development in MEMS Packaging Systems. MRS Online Proceedings Library, 741. https://doi.org/10.1557/proc-741-j5.22
Walwadkar, Satyajit S., Junghyun Cho, P.W. Farrell, and Lawrence E. Felton. “Tailoring of Stress Development in MEMS Packaging Systems”. MRS Online Proceedings Library 741 (2002). https://doi.org/10.1557/proc-741-j5.22.
1.
Walwadkar SS, Cho J, Farrell P, Felton LE. Tailoring of Stress Development in MEMS Packaging Systems. MRS Online Proceedings Library. 2002;741.
Refrences
| Title | Journal | Journal Categories | Citations | Publication Date |
|---|---|---|---|---|
| Title | 1996 | |||
| Title | 1993 | |||
| An Introduction to Microelectromechanical Systems | 2000 | |||
| Experimental Stress Analysis | 1991 | |||
| Elasticity in Engineering | 1968 |