A Review of Hydrophilic Silicon Wafer Bonding
Article Properties
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LanguageEnglish
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DOI (url)
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Publication Date2014/01/01
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Indian UGC (journal)
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Refrences125
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Citations78
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V. Masteika
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J. Kowal
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N. St. J. Braithwaite
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T. Rogers
Journal Categories
Science
Chemistry
Science
Physics
Technology
Chemical technology
Technology
Electrical engineering
Electronics
Nuclear engineering
Materials of engineering and construction
Mechanics of materials
Refrences
Citations
| Title | Journal | Journal Categories | Citations | Publication Date |
|---|---|---|---|---|
| An adjustable Ar ion-beam activation strategy to achieve hydrophilic bonding of Si and diamond by deposited AlN interlayer | Applied Surface Science |
| 2024 | |
| Nanostructuring, fractal characterization and wettability of ion irradiated Au thin films and their thickness effect | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms |
| 2024 | |
Room temperature wafer bonding through conversion of polysilazane into $$\hbox {SiO}_{2}$$ | Scientific Reports |
| 2024 | |
Heterogeneous integrated InP/SiC high-performance multilevel RRAM | Applied Physics Letters |
| 2024 | |
Role of humidity and surface roughness on direct wafer bonding | The European Physical Journal B |
| 2024 |
Citations Analysis
The category
Technology: Chemical technology 44
is the most commonly referenced area in studies that cite this article. The first research to cite this article was titled Adsorption and Self-Assembly of M13 Phage into Directionally Organized Structures on C and SiO2 Films and was published in 2014. The most recent citation comes from a 2024 study titled Nanostructuring, fractal characterization and wettability of ion irradiated Au thin films and their thickness effect. This article reached its peak citation in 2020, with 10 citations. It has been cited in 53 different journals, 9% of which are open access. Among related journals, the Japanese Journal of Applied Physics cited this research the most, with 9 citations. The chart below illustrates the annual citation trends for this article.