Features of the α-γ transition in a low-pressure rf argon discharge
Article Properties
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LanguageEnglish
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DOI (url)
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Publication Date1998/05/01
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Journal
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Indian UGC (journal)
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Refrences43
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Citations28
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V. A. Lisovskii
Journal Categories
Science
Physics
Technology
Chemical technology
Technology
Electrical engineering
Electronics
Nuclear engineering
Materials of engineering and construction
Mechanics of materials
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Refrences
| Title | Journal | Journal Categories | Citations | Publication Date |
|---|---|---|---|---|
| The space-time-averaging procedure and modeling of the RF discharge II. Model of collisional low-pressure RF discharge | IEEE Transactions on Plasma Science |
| 92 | 1992 |
| Stochastic electron heating in a capacitive RF discharge with non-Maxwellian and time-varying distributions | IEEE Transactions on Plasma Science |
| 34 | 1995 |
Monte Carlo simulations of electron distributions in the sheath region of reactive-ion-etching plasmas | Journal of Applied Physics |
| 19 | 1993 |
Numerical investigation of the kinetics and chemistry of rf glow discharge plasmas sustained in He, N2, O2, He/N2/O2, He/CF4/O2, and SiH4/NH3 using a Monte Carlo-fluid hybrid model | Journal of Applied Physics |
| 210 | 1992 |
| 10.1103/PhysRevA.45.2520 | Physical Review A | 1992 |
Refrences Analysis
The category
Science: Physics 26
is the most frequently represented among the references in this article. It primarily includes studies from Journal of Applied Physics and IEEE Transactions on Plasma Science. The chart below illustrates the number of referenced publications per year.
Refrences used by this article by year
Citations
| Title | Journal | Journal Categories | Citations | Publication Date |
|---|---|---|---|---|
SIMULATION OF CAPACITIVELY COUPLED RF DISCHARGE IN ARGON | 2023 | |||
| Synthesis of Nanoparticles and Theoretical Model of Their Retention in Plasma of RF Capacitive Discharge with Vertically Arranged Electrodes in Acetylene | ACS Omega |
| 1 | 2022 |
Predicting power–voltage characteristics and mode transitions in the COST reference microplasma jet | Journal of Physics D: Applied Physics |
| 2022 | |
| Roll-to-Roll Deposition of Thin Graphitic Films and Dependence on Discharge Modes in Radio Frequency Capacitively Coupled Plasma | IEEE Transactions on Plasma Science |
| 1 | 2022 |
Surface effects in a capacitive argon discharge in the intermediate pressure regime | Plasma Sources Science and Technology |
| 9 | 2021 |
Citations Analysis
The category
Science: Physics 18
is the most commonly referenced area in studies that cite this article. The first research to cite this article was titled Alpha–gamma transition in RF capacitive discharge in low-pressure oxygen and was published in 2004. The most recent citation comes from a 2023 study titled SIMULATION OF CAPACITIVELY COUPLED RF DISCHARGE IN ARGON. This article reached its peak citation in 2007, with 4 citations. It has been cited in 11 different journals. Among related journals, the IEEE Transactions on Plasma Science cited this research the most, with 5 citations. The chart below illustrates the annual citation trends for this article.