High-performance a-Ga2O3 solar-blind photodetectors by pulsed magnetron sputtering deposition

Article Properties
  • Language
    English
  • DOI (url)
  • Publication Date
    2024/03/14
  • Indian UGC (journal)
  • Refrences
    50
  • Difei Xue Fujian Key Laboratory of Polymer Materials, College of Chemistry and Materials Science, Fujian Normal University 1 , Fuzhou 350007, ChinaKey Laboratory of Optoelectronic Materials Chemistry and Physics, Fujian Institute of Research on the Structure of Matter, Chinese Academy of Sciences 2 , Fuzhou, 350002 ChinaFujian College, University of Chinese Academy of Sciences 3 , Fuzhou 350002, China ORCID (unauthenticated)
  • Peiwen Lv Key Laboratory of Optoelectronic Materials Chemistry and Physics, Fujian Institute of Research on the Structure of Matter, Chinese Academy of Sciences 2 , Fuzhou, 350002 ChinaFujian College, University of Chinese Academy of Sciences 3 , Fuzhou 350002, China ORCID (unauthenticated)
  • Kai Peng Key Laboratory of Optoelectronic Materials Chemistry and Physics, Fujian Institute of Research on the Structure of Matter, Chinese Academy of Sciences 2 , Fuzhou, 350002 ChinaFujian College, University of Chinese Academy of Sciences 3 , Fuzhou 350002, China
  • Qiang Hu Jihua Laboratory 4 , Foshan 528000, China
  • Chenlong Chen Key Laboratory of Optoelectronic Materials Chemistry and Physics, Fujian Institute of Research on the Structure of Matter, Chinese Academy of Sciences 2 , Fuzhou, 350002 ChinaFujian College, University of Chinese Academy of Sciences 3 , Fuzhou 350002, China
Abstract
Cite
Xue, Difei, et al. “High-Performance a-Ga2O3 Solar-Blind Photodetectors by Pulsed Magnetron Sputtering Deposition”. Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films, vol. 42, no. 3, 2024, https://doi.org/10.1116/6.0003442.
Xue, D., Lv, P., Peng, K., Hu, Q., & Chen, C. (2024). High-performance a-Ga2O3 solar-blind photodetectors by pulsed magnetron sputtering deposition. Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films, 42(3). https://doi.org/10.1116/6.0003442
Xue D, Lv P, Peng K, Hu Q, Chen C. High-performance a-Ga2O3 solar-blind photodetectors by pulsed magnetron sputtering deposition. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 2024;42(3).
Journal Categories
Science
Physics
Technology
Chemical technology
Technology
Electrical engineering
Electronics
Nuclear engineering
Materials of engineering and construction
Mechanics of materials
Refrences
Title Journal Journal Categories Citations Publication Date
Effect of Mo content on the microstructure and mechanical properties of CoCrFeNiMox HEA coatings deposited by high power impulse magnetron sputtering Surface and Coatings Technology
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
  • Science: Physics
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
1 2024
Solar-blind UV communication based on sensitive β -Ga2O3 photoconductive detector array

Applied Physics Letters
  • Science: Chemistry: Physical and theoretical chemistry
  • Science: Physics
  • Technology: Chemical technology
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
  • Science: Physics
17 2023
Effect of oxygen flow ratio on the performance of RF magnetron sputtered Sn-doped Ga2O3 films and ultraviolet photodetector Ceramics International
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
  • Technology: Chemical technology: Clay industries. Ceramics. Glass
  • Technology: Chemical technology
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
14 2023
Dependence of persistent photoconductivity on the thickness of β-Ga2O3 thin film photodetectors on c-plane sapphire via magnetron sputtering

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
  • Science: Physics
  • Technology: Chemical technology
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
  • Technology: Chemical technology
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
2 2023
Oxygen-vacancy-dependent high-performance α-Ga2O3 nanorods photoelectrochemical deep UV photodetectors

Nanotechnology
  • Technology: Chemical technology
  • Science: Chemistry
  • Science: Physics
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
  • Technology: Chemical technology
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
11 2023