Optical and geometric parameter extraction across 300-mm photonic integrated circuit wafers

Article Properties
  • Language
    English
  • DOI (url)
  • Publication Date
    2024/01/01
  • Journal
  • Indian UGC (journal)
  • Refrences
    39
  • Jordan N. Butt Naval Research Laboratory 1 , 4555 Overlook Ave. SW, Washington, DC 20375, USADepartment of Chemistry, University of Rochester 2 , 252 Elmwood Ave., Rochester, New York 14627, USA ORCID (unauthenticated)
  • Nathan F. Tyndall Naval Research Laboratory 1 , 4555 Overlook Ave. SW, Washington, DC 20375, USA ORCID (unauthenticated)
  • Marcel W. Pruessner Naval Research Laboratory 1 , 4555 Overlook Ave. SW, Washington, DC 20375, USA ORCID (unauthenticated)
  • Kyle J. Walsh Naval Research Laboratory 1 , 4555 Overlook Ave. SW, Washington, DC 20375, USA ORCID (unauthenticated)
  • Benjamin L. Miller Department of Dermatology, University of Rochester 3 , 40 Celebration Dr., Rochester, New York 14620, USAInstitute of Optics, University of Rochester 4 , 480 Intercampus Dr., Rochester, New York 14627, USA ORCID (unauthenticated)
  • Nicholas M. Fahrenkopf AIM Photonics 5 , 257 Fuller Road, Albany, New York 12203, USAResearch Foundation for the State University of New York 6 , P.O. Box 9, Albany, New York 12201, USA ORCID (unauthenticated)
  • Alin O. Antohe AIM Photonics 5 , 257 Fuller Road, Albany, New York 12203, USAResearch Foundation for the State University of New York 6 , P.O. Box 9, Albany, New York 12201, USA ORCID (unauthenticated)
  • Todd H. Stievater Naval Research Laboratory 1 , 4555 Overlook Ave. SW, Washington, DC 20375, USA ORCID (unauthenticated)
Abstract
Cite
Butt, Jordan N., et al. “Optical and Geometric Parameter Extraction across 300-Mm Photonic Integrated Circuit Wafers”. APL Photonics, vol. 9, no. 1, 2024, https://doi.org/10.1063/5.0173914.
Butt, J. N., Tyndall, N. F., Pruessner, M. W., Walsh, K. J., Miller, B. L., Fahrenkopf, N. M., Antohe, A. O., & Stievater, T. H. (2024). Optical and geometric parameter extraction across 300-mm photonic integrated circuit wafers. APL Photonics, 9(1). https://doi.org/10.1063/5.0173914
Butt, Jordan N., Nathan F. Tyndall, Marcel W. Pruessner, Kyle J. Walsh, Benjamin L. Miller, Nicholas M. Fahrenkopf, Alin O. Antohe, and Todd H. Stievater. “Optical and Geometric Parameter Extraction across 300-Mm Photonic Integrated Circuit Wafers”. APL Photonics 9, no. 1 (2024). https://doi.org/10.1063/5.0173914.
Butt JN, Tyndall NF, Pruessner MW, Walsh KJ, Miller BL, Fahrenkopf NM, et al. Optical and geometric parameter extraction across 300-mm photonic integrated circuit wafers. APL Photonics. 2024;9(1).
Journal Categories
Science
Physics
Science
Physics
Acoustics
Sound
Science
Physics
Optics
Light
Technology
Chemical technology
Technology
Electrical engineering
Electronics
Nuclear engineering
Materials of engineering and construction
Mechanics of materials
Technology
Engineering (General)
Civil engineering (General)
Applied optics
Photonics
Refrences
Title Journal Journal Categories Citations Publication Date
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  • Technology: Electrical engineering. Electronics. Nuclear engineering: Electric apparatus and materials. Electric circuits. Electric networks
  • Science: Physics: Optics. Light
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Telecommunication
  • Technology: Engineering (General). Civil engineering (General): Applied optics. Photonics
  • Science: Physics: Acoustics. Sound
  • Science: Physics: Optics. Light
  • Technology: Engineering (General). Civil engineering (General)
1 2023
A photonic biosensor-integrated tissue chip platform for real-time sensing of lung epithelial inflammatory markers

Lab on a Chip
  • Science: Chemistry: Organic chemistry: Biochemistry
  • Science: Chemistry: General. Including alchemy
  • Science: Chemistry: Analytical chemistry
  • Technology: Chemical technology
  • Science: Mathematics: Instruments and machines
  • Science: Chemistry: Analytical chemistry
  • Science: Chemistry
2 2023
Biosensing with Silicon Nitride Microring Resonators Integrated with an On-Chip Filter Bank Spectrometer ACS Sensors
  • Science: Chemistry: General. Including alchemy
  • Science: Chemistry: Analytical chemistry
  • Technology: Chemical technology
  • Science: Chemistry
9 2023
Optical and geometric parameter extraction for photonic integrated circuits

Optics Express
  • Technology: Engineering (General). Civil engineering (General): Applied optics. Photonics
  • Science: Physics: Optics. Light
  • Technology: Chemical technology
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
  • Science: Physics: Optics. Light
  • Science: Physics
1 2022
Waveguide-Enhanced Raman Spectroscopy (WERS): An Emerging Chip-Based Tool for Chemical and Biological Sensing

Sensors
  • Technology: Chemical technology
  • Science: Chemistry: Analytical chemistry
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Electric apparatus and materials. Electric circuits. Electric networks
  • Science: Mathematics: Instruments and machines
  • Science: Chemistry: Analytical chemistry
  • Science: Chemistry
6 2022
Refrences Analysis
The category Science: Physics: Optics. Light 34 is the most frequently represented among the references in this article. It primarily includes studies from Journal of Lightwave Technology and IEEE Photonics Journal. The chart below illustrates the number of referenced publications per year.
Refrences used by this article by year