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ULSI interconnect formation using dispersed nanoparticles
Article Properties
Language
English
DOI (url)
10.1016/s1359-6462(01)00878-8
Publication Date
2001/05/01
Journal
Scripta Materialia
Indian UGC (journal)
Refrences
2
H
Iwashige
G
Kutulk
S
Hayashi
T
Suzuki
T
Yoshida
T
Abe
M
Oda
Journal Categories
Science
Chemistry
Technology
Chemical technology
Technology
Electrical engineering
Electronics
Nuclear engineering
Materials of engineering and construction
Mechanics of materials
Technology
Mining engineering
Metallurgy
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Refrences
Title
Journal
Journal Categories
Citations
Publication Date
Title
1998
T. Suzuki, N. Imazeki, G. Yu, H. Itou, and M. Oda, in Proceeding of the 9th International Microelectronics Conference, p. 37 (1996).