Control-oriented plasma modeling and controller design for reactive sputtering

Article Properties
Cite
Woelfel, Christian, et al. “Control-Oriented Plasma Modeling and Controller Design for Reactive Sputtering”. IFAC Journal of Systems and Control, vol. 16, 2021, p. 100142, https://doi.org/10.1016/j.ifacsc.2021.100142.
Woelfel, C., Oberberg, M., Berger, B., Engel, D., Brinkmann, R. P., Schulze, J., Awakowicz, P., & Lunze, J. (2021). Control-oriented plasma modeling and controller design for reactive sputtering. IFAC Journal of Systems and Control, 16, 100142. https://doi.org/10.1016/j.ifacsc.2021.100142
Woelfel C, Oberberg M, Berger B, Engel D, Brinkmann RP, Schulze J, et al. Control-oriented plasma modeling and controller design for reactive sputtering. IFAC Journal of Systems and Control. 2021;16:100142.
Journal Category
Technology
Mechanical engineering and machinery
Refrences
Title Journal Journal Categories Citations Publication Date
The multipole resonance probe-based controller: a technology to investigate plasma-based deposition 2019
Anomalous effects in the aluminum oxide sputtering yield Journal of Physics D: Applied Physics
  • Science: Chemistry: Physical and theoretical chemistry
  • Science: Physics
  • Technology: Chemical technology
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
  • Science: Physics
 10 2018
Quantitative modeling of reactive sputtering process for mgo thin film deposition Thin Solid Films
  • Science: Chemistry
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
  • Science: Physics
  • Science: Physics
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
  • Technology: Chemical technology
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
  • Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
 2001
The effect of pole and zero locations on the transient response of linear dynamic systems 1949
Model approximation and stabilization of reactive sputter processes Journal of Process Control
  • Technology: Mechanical engineering and machinery
  • Technology: Chemical technology: Chemical engineering
  • Technology: Chemical technology: Chemical engineering
  • Technology: Engineering (General). Civil engineering (General)
 8 2019
Refrences Analysis
Category Category Repetition
Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials8
Science: Physics4
Science: Chemistry2
Technology: Chemical technology2
Technology: Chemical technology: Chemical engineering2
Technology: Mechanical engineering and machinery1
Technology: Engineering (General). Civil engineering (General)1
The category Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials 8 is the most frequently represented among the references in this article. It primarily includes studies from Thin Solid Films The chart below illustrates the number of referenced publications per year.
Refrences used by this article by year
Citations
Title Journal Journal Categories Citations Publication Date
2022 Review of Data-Driven Plasma Science IEEE Transactions on Plasma Science
  • Science: Physics: Electricity and magnetism: Electricity: Plasma physics. Ionized gases
  • Science: Physics
 2 2023
Experimental investigations of plasma dynamics in the hysteresis regime of reactive RF sputter processes

 Plasma Sources Science and Technology
  • Science: Chemistry: Physical and theoretical chemistry
  • Science: Physics: Electricity and magnetism: Electricity: Plasma physics. Ionized gases
  • Science: Physics
 3 2022
Citations Analysis
Category Category Repetition
Science: Physics: Electricity and magnetism: Electricity: Plasma physics. Ionized gases2
Science: Physics2
Science: Chemistry: Physical and theoretical chemistry1
The category Science: Physics: Electricity and magnetism: Electricity: Plasma physics. Ionized gases 2 is the most commonly referenced area in studies that cite this article.