Sensors and Actuators A: Physical

Title Publication Date Language Citations
1998/06/01English
Mass-producible monolithic silicon probes for scanning probe microscopes1998/12/01English
Improvement of the porous silicon sacrificial-layer etching for micromachining applications1997/07/01English
Small piezoresistive silicon microphones specially designed for the characterization of turbulent gas flows1995/01/01English
Platinum/palladium thin-film thermocouples for temperature measurements on silicon wafers1998/06/01English
Thermo-optic effect exploitation in silicon microstructures1998/11/01English
Discrimination of aromatic optical isomers using quartz-resonator sensors1995/06/01English
High sensitivity acoustic transducers with thin p+ membranes and gold back-plate1999/12/01English
Anisotropic etching of germanium1995/01/01English
New silicon micromachining techniques for microsystems1997/07/01English
Gallium phosphate, GaPO4: a new piezoelectric crystal material for high-temperature sensorics1997/06/01English
Mechanical response of thickness-shear mode quartz-crystal resonators to linear viscoelastic fluids1998/01/01English
Microcoils fabricated by UV depth lithography and galvanoplating1996/06/01English
Neural net based torque sensor using birefringent materials1998/10/01English
A multiplexed network of optically powered, addressed and interrogated hybrid resonant sensors1995/03/01English
Ambient temperature coefficient of thermal piezoacoustic sensors operating in a twin configuration1998/05/01English
Temperature dependence and drift of a thermal accelerometer1998/04/01English
The slot microphone, a new microphone excitation concept1999/08/01English
The property of plasma-polymerized fluorocarbon film in relation to CH4/C4F8 ratio and substrate temperature2000/05/01English
Etching simulation of convex and mixed InP and Si structures1998/09/01English
Pyroelectricity of PZT-based thick-films1999/08/01English
Piezoelectric properties of PZT films for microcantilever1999/04/01English
Fabrication of a thermopneumatic microactuator with a corrugated p+ silicon diaphragm2000/03/01English
Determining thermal expansion coefficients of thin films using micromachined cantilevers1999/09/01English
An integrable nozzle for monolithic microfluidic devices1998/03/01English
High-aspect-ratio rotary polygon micromotor scanners1999/09/01English
Fabrication of substrate-free microelectromechanical systems using through-etch alignments1998/01/01English
Measurement of micromechanical properties of polysilicon microstructures with an atomic force microscope1998/05/01English
Electroforming of 3D microstructures on highly structured surfaces2000/05/01English
Characterization of a planar microcoil for implantable microsystems1997/07/01English