Journal of the Vacuum Society of Japan

Title Publication Date Language Citations
Material Production Technology for Oxide Semiconductor Gas Sensors: Recent Research Progress2017/01/01English5
Current Status of Microtomography with Synchrotron Radiation X-ray Source2011/01/015
Growth of Target Race Track Profile during Magnetron Sputtering2015/01/01English5
Monte Carlo Simulation of Gas-sheet Targets Generated by Narrow Slits2013/01/01English5
Effect of Surface Processing on Hydrogen Desorption from Stainless Steel to UHV2014/01/01English5
Oxygen Incorporation in Reactive-Sputter-Deposited TiN Films: Influence of the Metal to O2 Gas Flux Ratio2014/01/01English5
Analysis of a Pumping Curve of Water with the Conversion Equation from Pressure to Adsorption Density of States2013/01/01English5
Structure and Growth Mechanism of Anodic Oxide Films Formed on Aluminum and Their Gas Emission Property in Vacuum2009/01/015
Monitoring of Condition of Deposited Film Causing Particles in Plasma Etching by Using Practical Load Impedance Monitoring Method2016/01/01English5
2008/01/015
A New Plasma Resistant Coating Reducing Particle Generations2010/01/015
Development of a Constant Pressure Type Flowmeter for the Vacuum Standard2010/01/015
Control of Interfacial Structure for Granular Type Perpendicular Magnetic Recording Media2008/01/015
Demonstration of Pumping Efficiency for Rotating Disks by Monte Carlo Simulation2010/01/015
Evaluation of Surface Oxidation Behavior on Silver Film for Active Oxygen Detector2010/01/015
Vacuum Technologies in High-Power Proton Accelerators2016/01/01English5
Effects of Atomic Weight, Gas Pressure, and Target-to-substrate Distance on Deposition Rates in the Sputter Deposition Process2014/01/01English5
Development of One-Body Type Water- and Air-Cooling Fixed Masks Made of Forged 0.2% Beryllium Copper Alloy2010/01/014
Basic Concepts to Kinetic Theory of Gases2013/01/01English4
Surfaces in Vacuum Technology2013/01/01English4
Characteristics of the Electron Beam Ion Source2012/01/014
Report and Impressions on the 51st Vacuum Summer School2012/01/014
Influence of Temperature and Temperature Calibration on Hydrogen Sensing Using a Quartz Oscillator2013/01/01English4
Hydrogen Thermal Desorption Analysis for the Studies of Hydrogen Embrittlement of High Strength Steels2014/01/01English4
Fundamentals of Chemical Vapor Deposition Technologies2016/01/01English4
Novel Applications of Field Emitter Arrays ∼Towards Electron Devices under Harsh Environments and Light Sources∼2017/01/01English4
Novel Catalysis by Gold: A Modern Alchemy2008/01/01English4
Superhydrophobic Coatings Prepared by Spraying Hydrophobic Nanoparticles2015/01/01English4
Interactions of the Cluster Beams with Solid Surfaces2009/01/014
Problem of Gas Dose with Micro-Capillary Array2009/01/014