| Review of CVD Synthesis of Graphene | 2013/11/06 | English | 423 |
| A Kinetic Model for Step Coverage by Atomic Layer Deposition in Narrow Holes or Trenches | 2003/03/17 | English | 296 |
| The CVD of Nanodiamond Materials | 2008/07/01 | English | 253 |
| Ruthenium Thin Films Grown by Atomic Layer Deposition | 2003/01/03 | English | 221 |
| Atomic Layer Deposition of Photocatalytic TiO2 Thin Films from Titanium Tetramethoxide and Water | 2004/06/01 | English | 192 |
| Processing and Applications of Aerosol‐Assisted Chemical Vapor Deposition | 2006/10/01 | English | 185 |
| Large‐Scale Synthesis of Few‐Layered Graphene using CVD | 2009/03/01 | English | 180 |
| Metal Chalcogenide Materials: Chalcogenolato complexes as “single‐source” precursors | 1996/05/01 | English | 160 |
| CVD Growth of MoS2‐based Two‐dimensional Materials | 2015/11/13 | English | 157 |
| Growth Per Cycle in Atomic Layer Deposition: A Theoretical Model | 2003/10/16 | English | 147 |
| A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy | 2014/10/15 | English | 145 |
| Chemical vapor deposition of metals: Part 1. An overview of CVD processes | 1995/07/01 | English | 144 |
| Vanadium Oxide Compounds: Structure, Properties, and Growth from the Gas Phase | 2014/07/22 | English | 129 |
| Synthesis and Functional Properties of Vanadium Oxides: V2O3, VO2, and V2O5 Deposited on Glass by Aerosol‐Assisted CVD | 2007/04/01 | English | 128 |
| Synthesis, Properties, and Applications of Ferromagnetic‐Filled Carbon Nanotubes | 2006/06/01 | English | 125 |
| Atomic Layer Deposition of CuxS for Solar Energy Conversion | 2003/01/03 | English | 125 |
| Atomic Layer Deposition of Ruthenium Thin Films from Ru(thd)3 and Oxygen | 2004/08/01 | English | 123 |
| Recent and Expected Roles of Plasma‐Polymerized Films for Biomedical Applications | 2007/07/01 | English | 122 |
| Volatile Metal β‐Diketonates: ALE and CVD precursors for electroluminescent device thin films | 1997/08/01 | English | 110 |
| Molecular Layer Deposition of Hybrid Organic‐Inorganic Polymer Films using Diethylzinc and Ethylene Glycol | 2009/06/01 | English | 108 |
| Raman Studies of Nano‐ and Ultra‐nanocrystalline Diamond Films Grown by Hot‐Filament CVD | 2010/06/01 | English | 107 |
| Nanocoating Individual Silica Nanoparticles by Atomic Layer Deposition in a Fluidized Bed Reactor | 2005/10/01 | English | 105 |
| Thin Polymer Films with High Step Coverage in Microtrenches by Initiated CVD | 2008/09/01 | English | 92 |
| Growth Per Cycle in Atomic Layer Deposition: Real Application Examplesof a Theoretical Model | 2003/12/12 | English | 89 |
| Fabrication of High‐Purity, Double‐Walled Carbon Nanotube Buckypaper | 2006/06/01 | English | 88 |
| Film Uniformity in Atomic Layer Deposition | 2006/01/01 | English | 86 |
| Fabrication and Characterization of 3C‐SiC‐Based MOSFETs | 2006/08/21 | English | 84 |
| The World of Carbon Nanotubes: An Overview of CVD Growth Methodologies | 2006/06/01 | English | 81 |
| Chemical Vapor Deposition Enhanced by Atmospheric Pressure Non‐thermal Non‐equilibrium Plasmas | 2005/12/01 | English | 79 |
| 4H SiC Epitaxial Growth with Chlorine Addition | 2006/08/21 | English | 78 |