Microsystem Technologies

Title Publication Date Language Citations
Nonlinear dynamics of MEMS/NEMS resonators: analytical solution by the homotopy analysis method2016/05/03English51
Evaluation of the mixing performance in a planar passive micromixer with circular and square mixing chambers2017/12/29English51
Process research of high aspect ratio microstructure using SU-8 resist2004/05/0151
Materials of LIGA technology1999/02/2651
Development of a novel type of microrobot for biomedical application2007/09/15English51
Direct joining of a laser-ablated metal surface and polymers by precise injection molding2015/08/01English51
Optimal novel super-twisting PID sliding mode control of a MEMS gyroscope based on multi-objective bat algorithm2018/01/05English51
Dynamic characteristics and forced response of an electrostatically-actuated microbeam subjected to fluid loading2009/07/29English50
A flexible PDMS capacitive tactile sensor with adjustable measurement range for plantar pressure measurement2013/09/26English50
High-aspect-ratio WC-Co microstructure produced by the combination of LIGA and micro-EDM2000/08/0450
Cylindrical functionally graded shell model based on the first order shear deformation nonlocal strain gradient elasticity theory2017/07/01English50
Fabrication of micro-gas chromatograph columns for fast chromatography2006/06/20English50
Nonlinear behaviour of membrane type electromagnetic energy harvester under harmonic and random vibrations2013/10/16English49
Pathfinder algorithm optimized fractional order tilt-integral-derivative (FOTID) controller for automatic generation control of multi-source power system2020/06/16English49
A vibrating micro-scale CMM probe for measuring high aspect ratio structures2009/12/24English49
Superior performance of a MEMS-based solid propellant microthruster (SPM) array with nanothermites2016/10/06English48
Surface characterization and friction of a bio-inspired reversible adhesive tape2006/09/14English48
Development of an assembly process and reliability investigations for flip-chip LEDs using the AuSn soldering2002/01/0147
Planar dual-band 27/39 GHz millimeter-wave MIMO antenna for 5G applications2020/07/09English47
Permanent magnet configuration in design of an eddy current damper2008/11/14English47
Thermally activated solvent bonding of polymers2007/11/15English47
Influence of surface stress on frequency of microcantilever-based biosensors2004/05/0146
Nanotribological characterization of perfluoroalkylphosphonate self-assembled monolayers deposited on aluminum-coated silicon substrates2006/04/07English46
Darcy–Forchheimer flow and heat transfer augmentation of a viscoelastic fluid over an incessant moving needle in the presence of viscous dissipation2019/02/12English46
High temperature resistant antireflective moth-eye structures for infrared radiation sensors2005/02/01English46
Various replication techniques for manufacturing three-dimensional metal microstructures1997/12/1246
Fracture and fatigue behavior of single crystal silicon microelements and nanoscopic AFM damage evaluation1998/10/2346
A microfluidic pore model to study the migration of fine particles in single-phase and multi-phase flows in porous media2017/06/12English46
Analysis of the demolding forces during hot embossing2006/06/10English46
Mechanical behavior of a circular micro plate subjected to uniform hydrostatic and non-uniform electrostatic pressure2007/08/04English46