Title	Publication Date	Language	Citations
Influence of surface effects on vibration behavior of a rotary functionally graded nanobeam based on Eringen’s nonlocal elasticity	2016/01/20	English	85
Nodal/saddle stagnation-point boundary layer flow of CuO–Ag/water hybrid nanofluid: a novel hybridity model	2019/02/20	English	82
Electromechanical model of RF MEMS switches	2003/09/01		82
Lab-on-a-chip: a component view	2010/09/18	English	80
Carbon nanotubes: a review on properties, synthesis methods and applications in micro and nanotechnology	2021/01/23	English	79
Control tribological and mechanical properties of MEMS surfaces. Part 1: critical review	1999/07/22		78
Soft X-ray lithography of high aspect ratio SU8 submicron structures	2008/01/09	English	78
Reduction of diffraction effect of UV exposure on SU-8 negative thick photoresist by air gap elimination	2002/08/01		76
Polymeric microneedle fabrication using a microinjection molding technique	2006/05/30	English	75
Study of PMMA thermal bonding	2006/06/20	English	74
Fabrication of microneedle array using LIGA and hot embossing process	2005/04/01	English	74
Research development of silicon MEMS gyroscopes: a review	2015/08/06	English	74
A novel approach for investigation of heat transfer enhancement with ferromagnetic hybrid nanofluid by considering solar radiation	2020/06/12	English	74
Dielectric materials for electrowetting-on-dielectric actuation	2009/11/07	English	73
Injection molding of polymeric LIGA HARMs	1999/12/17		71
Injection molding of components for microsystems	2001/10/01		71
A roller embossing process for rapid fabrication of microlens arrays on glass substrates	2006/02/21	English	70
Nonlinear bending vibration of a rotating nanobeam based on nonlocal Eringen’s theory using differential quadrature method	2015/08/25	English	70
Rapid replication of polymeric and metallic high aspect ratio microstructures using PDMS and LIGA technology	2002/11/01		70
Injection molding and related techniques for fabrication of microstructures	1997/05/16		69
Micro cell encapsulation and its hydrogel-beads production using microfluidic device	2006/12/01	English	69
An effective PDMS microfluidic chip for chemiluminescence detection of cobalt (II) in water	2012/06/08	English	68
A multipurpose electrothermal microgripper for biological micro-manipulation	2012/06/14	English	67
Injection molding and characterization of PMMA-based microfluidic devices	2019/10/15	English	66
Enhancement of heat transfer in a convergent/divergent channel by using carbon nanotubes in the presence of a Darcy–Forchheimer medium	2019/05/25	English	66
Experimental determination of mechanical properties of Ni and Ni-Fe microbars	1996/10/17		65
Manufacturing of polymer micro parts by ultrasonic plasticization and direct injection	2011/02/01	English	64
Silicon hotplates for metal oxide gas sensor elements	1997/08/01	English	62
Development of a piezoelectric polymer-based sensorized microgripper for microassembly and micromanipulation	2004/05/01		62
SU8-micromechanical structures with in situ fabricated movable parts	2002/08/01		61